Vacuum pump 3D Models

Find the best Vacuum pump 3D Models, free download in STL, FBX, GLB, OBJ, 3MF, USDZ for 3D modeling and creation in Blender, 3D printing, game developing, animation, eCommerce, AR/VR and etc. Generated by Tripo AI 3D Generator.

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1. Overall Tool Structure (Outer to Inner)

The etching system is a closed vacuum-based processing tool mounted on a rigid frame, typically connected to a sub-fab below for pumps and gas handling.

Main internal sections:

Load lock chamber

Transfer chamber (robot)

Process (etch) chamber

Plasma generation system

Gas delivery & exhaust system

Wafer chuck (electrostatic chuck)

RF power & control modules

2. Load Lock Chamber (Wafer Entry)

Purpose: Isolate cleanroom air from vacuum environment.

3D elements to show:

FOUP port at the front

Load lock door

Vacuum pump connection

Pressure gauges

Working:

Wafer enters from FOUP

Load lock door closes

Chamber is pumped down from atmospheric pressure to vacuum

Once pressure matches process chamber, wafer transfers inside

3. Transfer Chamber & Robot Arm

Purpose: Move wafers without human contact.

3D elements:

Central vacuum chamber

Multi-axis robotic arm

Wafer end-effector (blade)

Gate valves to process chambers

Working:

Robot arm picks wafer fro

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生成一个缫丝机器人.上面是一个黑色的方体，是扫地机器人的收容充电桩，地下是这个圆盘扫地机器人

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